groove depth

On the choice of groove parameters, the influences of groove parameters ( such as groove depth, groove opening angle and groove root radius) on the groove bottom stress concentration extent were analyzed by finite element method.

在切口参数的选择上，本文使用有限元方法分析了切口深度、切口张开角度及切口根部圆角半径等对切口处应力集中程度的影响。

The tire noise increased as the groove depth and number increased;

随着轮胎沟槽深度的增大和沟槽数目的增加，轮胎噪声增大；

The patterns etched are of high resolution, and the groove depth and groove wall angle can be controlled with less surface stress.

具有极高的分辨率，能够控制槽深和槽壁角度，表面应力小。

The result shows that the groove depth and duty cycle error of phase mask must be controlled within the range of| Δ h| < 38nm and| Δ f| < 0.11 respectively in order to make the zero order diffraction efficiency less than 5%.

分析表明，为使零级衍射效率小于5%，相位掩模的刻槽深度和占空比制作误差必须控制在｜Δh｜＜38nm和｜Δf｜＜0.11的范围内。

Method for Controlling Groove Depth and Duty Cycle of Rectangular Photoresist Gratings

一种控制矩形光刻胶光栅槽深和占宽比的方法